Low-pressure plasma system V10-G

Efficient batch system for removal of photoresist

The batch system V10-G is designed for the removal of photoresists. Furthermore, it can be optimally used for the cleaning of wafers.

Low-pressure plasma system V10-G

Low-pressure plasma system V10-G
Icon areas

Areas of application

  • Ideal system for removing photoresist layers (also SU-8) after drying processes like RIE or Ion Beam etching as well as after high dose implant processes
  • Silicon wafers or other substrate cleaning prior wet processing to achieve a better wettability for an uniform and efficient result
  • Applicable for processes in MEMS and nano technology
  • Polymer removal e.g. after Bosch processes
  • Removal of organic sacrificial layers
  • Conditioning of bioactive compounds
Icon data sheet

Data sheet

Type of system Tabletop unit
Dimensions of the chamber (Ø x D) 215 x 260 mm
Microwave power 50-600 W
Gas inlets with mass flow controller 1 channel
Power supply 230 V, 50/60 Hz
Power input (without pump) 1.5 kVA
Vacuum gauge Pirani
Dimensions of the system (W x D x H) 720 x 820 x 820 mm
Icon Options

Options

Vacuum pump YES
Ozone trap YES
Additional gas inlets up to 2
Soft start and slow vent YES
Faraday cage YES
Process pressure control valve YES
Icon features

System features

  • Process chamber: quartz glass
  • Pullout door
  • PLC control: SPS (S7-300)
  • Resistive touch panel with Windows operating system (also operable with gloves)
  • Remote maintenance (VPN)
  • Ethernet interface

Compare systems

Type

V6-G V10-G V15-G V55-G V80-G-Side
Type of system Tabletop unit Tabletop unit 19" cabinet 19" cabinet 19" cabinet
Dimensions of the chamber
(W x D x H)
[mm]
170 x 200 x 170 Ø215 x 260 250 x 250 x 250 400 x 460 x 340 400 x 500 x 430
Microwave power
[W]
50-300 50-600 100-600 100-1,200 100-1,200
Gas inlets with mass flow control 1 1 1 2 2
Power supply 230 V, 50/60 Hz 230 V, 50/60 Hz 230 V, 50/60 Hz 230 V, 50/60 Hz 230 V, 50/60 Hz
Power input (without pump)
[kVA]
0.5 1.5 1.5 2.2 2.2
Dimensions of the system
(W x D x H)
[mm]
640 x 710 x 710 720 x 820 x 820 670 x 900 x 1,850 670 x 900 x 1,850 850 x 900 x 1,850

Options

         
Additional gas inlets 2 2 3 2 2
Additional excitation frequencies
(40 kHz, 13.56 MHz)
- - yes yes Yes
Soft start/slow vent Yes Yes Yes Yes Yes
Lateral microwave feed-in Yes - Yes - Yes
Rotary table - - Yes Yes Yes
Rotary drum Yes - Yes Yes Yes
Pullout door - Yes - Yes Yes
Automatic door opening - - - Yes Yes

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