Low-pressure plasma system V80-G-Side

Standard system for activation, cleaning, coating and etching

The system V80-G-Side is suitable for industrial production as well as for R&D applications in the laboratory sector.

The integrated professional SPS control serves as a storage for definable processes and parameters.

Type of system	19" cabinet
Dimensions of the chamber (W x D x H)	400 x 500 x 430 mm
Microwave power	100 – 1,200 W
Gas inlets with mass flow control	2
Power supply	230 / 400 V, 50 / 60 Hz
Power input (without pump)	2.2 kVA
Dimensions of the system (W x D x H)	850 x 900 x 1,850 mm
Lateral microwave feed-in

Additional gas inlets	2
Additional excitation frequencies (40 kHz, 13.56 MHz)
Soft start / slow vent
Rotary table
Rotary drum
Pullout door
Automatic door opening

Type	V6-G	V10-G	V15-G	V55-G	V80-G-Side
Type of system	Tabletop unit	Tabletop unit	19" cabinet	19" cabinet	19" cabinet
Dimensions of the chamber (W x D x H) [mm]	170 x 200 x 170	Ø215 x 260	250 x 250 x 250	400 x 460 x 340	400 x 500 x 430
Microwave power [W]	50-300	50-600	100-600	100-1,200	100-1,200
Gas inlets with mass flow control	1	1	1	2	2
Power supply	230 V, 50/60 Hz	230 V, 50/60 Hz	230 V, 50/60 Hz	230 V, 50/60 Hz	230 V, 50/60 Hz
Power input (without pump) [kVA]	0.5	1.5	1.5	2.2	2.2
Dimensions of the system (W x D x H) [mm]	640 x 710 x 710	720 x 820 x 820	670 x 900 x 1,850	670 x 900 x 1,850	850 x 900 x 1,850
Options
Additional gas inlets	2	2	3	2	2
Additional excitation frequencies (40 kHz, 13.56 MHz)	-	-
Soft start/slow vent
Lateral microwave feed-in		-		-
Rotary table	-	-
Rotary drum		-
Pullout door	-		-
Automatic door opening	-	-	-