The efficient method for best results

Wide range of application

Low-pressure plasma is produced by electromagnetic fields. The induced chemical reactions and physical effects depend on the respective gas and excitation frequency used for plasma formation.

The used gas, for instance, determines if the respective plasma is an oxidizing or reducing medium or neither of them (neutral).

Neutral plasmas

Neutral plasma forms e.g. if a noble gas like argon is used. The major effect of neutral plasma is physical: Contaminants are removed by a bombardment with heavy ions (sputtering). Low excitation frequencies (kHz range) will boost this effect significantly as ions will gain much more velocity before they impact onto the surface. As fast and heavy ions transfer heat to the surfaces they collide with, this method is limited to suitable materials and surfaces.

Reactive plasmas

Reactive plasmas are formed from gases like oxygen, hydrogen or fluorocarbons. The oxidizing, reducing or functionalizing effects originate from the ions and radicals present in plasma which readily react with the substrate material or the topping contaminant. After plasma treatment, surfaces are activated, passivated or particularly clean, respectively.

An especially high excitation frequency (GHz) promotes such reactions as it results in a high ion density in the plasma phase and therefore maximizes reactivity. Simultaneously, ion energies remain low, so sputter effects and heat load are minimized or not incurred at all.

Eco-friendly and efficient

Such procedures of the low-pressure plasma technology are not only extremely efficient, but also ecologically neutral and economically useful because usually no polluting waste products and no disposal costs incur therefore.