Plasma Technology

What is low-pressure plasma?

The gentle power of the fourth aggregate state

Matter changes its form of appearance at specific temperatures. Generally, solid, liquid and gaseous aggregate states are known. However, there is another state – the plasma. Plasma is the ionized form of a gas and is also named “fourth aggregate state”. The difference between neutral gas and plasma is the significantly higher electrical conductivity and chemical reactivity.

lightning, Northern lights

Samples for naturally occurring plasmas are lightning, northern lights or sun. However, in our everyday lives we also encounter plasma in the form of fluorescent lamps, low-energy lamps or television.

plasma lamp and the electric arc

Artificially produced plasmas are e.g. the plasma lamp and the electric arc in welding technology.

Low-pressure plasma – energy without heat

At atmospheric pressure, plasma is very hot – as in flames and arc discharge. If pressure is reduced to e.g. 100 Pa, plasma can be produced at low temperatures. This is so-called cold plasma or, more precisely, non-thermal plasma.

The material, treated with low-pressure plasma, is only slightly heated because the gas has a very low temperature. However, the energy of the electrons corresponds to a temperature of several 1,000 K. This advantage enables the treatment of e.g. plastic or other temperature-sensitive materials.

Low pressure plasma principle

low pressure plasma principle

Low-pressure plasma systems

V6-GLow-pressure plasma system V6-G
  • Tabletop unit
  • Chamber size: 170 x 200 x 170 mm
  • Microwave power: 50-300 W
  • 1 gas inlet
  • Supply: 230 V, 50/60 Hz
  • Power input (without pump): 0.5 kVA
  • Dimensions: 640 x 710 x 710 mm
V10-GLow-pressure plasma system V10-G
  • Tabletop unit
  • Chamber size (Ø x T): 215 x 260 mm
  • Microwave power: 50-600 W
  • 1 gas inlet
  • Supply: 400 V, 50/60 Hz
  • Power input (without pump): 1.5 kVA
  • Dimensions: 720 x 820 x 820 mm
V15-GLow-pressure plasma system V15-G
  • 19" cabinet
  • Chamber size: 250 x 250 x 250 mm
  • Microwave power: 100-600 W
  • 1 gas inlet
  • Supply: 230/400 V, 50/60 Hz
  • Power input (without pump): 1.5 kVA
  • Dimensions: 670 x 900 x 1,850 mm
V55-GLow-pressure plasma system V55-G
  • 19" cabinet
  • Chamber size: 400 x 460 x 340 mm
  • Microwave power: 100-1,200 W
  • 2 gas inlets
  • Supply: 230/400 V, 50/60 Hz
  • Power input (without pump): 2.2 kVA
  • Dimensions: 670 x 900 x 1,850 mm
V80-GLow-pressure plasma system V80-G
  • 19" cabinet
  • Chamber size: 400 x 460 x 430 mm
  • Microwave power: 100-1,200 W
  • 2 gas inlets
  • Supply: 230/400 V, 50/60 Hz
  • Power input (without pump): 2.2 kVA
  • Dimensions: 670 x 900 x 1,850 mm
V80-G-SideLow-pressure plasma system V80-G Side
  • 19" cabinet
  • Chamber size: 400 x 500 x 430 mm
  • Microwave power: 100-1,200 W
  • 2 gas inlets
  • Supply: 230/400 V, 50/60 Hz
  • Power input (without pump): 2.2 kVA
  • Dimensions: 850 x 900 x 1,850 mm
Inline systemsInline systems
  • Inline plasma treatment
Special systemsSpecial systems
  • A suitable solution for each customer requirement
Reel-to-reel systemsReel-to-reel systems
  • For plasma treatment of flexible tapes

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