Low-pressure plasma system V80-G

Standard system for activation, cleaning, coating and etching

The system V80-G is suitable for industrial production as well as for R&D applications in the laboratory sector.

The integrated professional SPS control serves as a storage for definable processes and parameters.

Low-pressure plasma system V80-G

Low-pressure plasma system V80-G
Icon data sheet

Data sheet

Type of system 19" cabinet
Dimensions of the chamber (W x D x H) 400 x 460 x 430 mm
Microwave power 100 – 1,200 W
Gas inlets with mass flow control 2
Power supply 230 / 400 V, 50 / 60 Hz
Power input (without pump) 2.2 kVA
Dimensions of the system (W x D x H) 670 x 900 x 1,850 mm
Icon options

Options

Additional gas inlets 2
Additional excitation frequencies
(40 kHz, 13.56 MHz)
YES
Soft start / slow vent YES
Lateral microwave feed-in -
Rotary table YES
Rotary drum YES
Pullout door YES
Automatic door opening YES
Icon features

System features

  • USB port
  • Ethernet interface
  • Remote maintenance (VPN)
  • Microwave source (2.45 GHz)
  • Swing door

Compare systems

Type

V6-G V10-G V15-G V55-G V80-G-Side
Type of system Tabletop unit Tabletop unit 19" cabinet 19" cabinet 19" cabinet
Dimensions of the chamber
(W x D x H)
[mm]
170 x 200 x 170 Ø215 x 260 250 x 250 x 250 400 x 460 x 340 400 x 500 x 430
Microwave power
[W]
50-300 50-600 100-600 100-1,200 100-1,200
Gas inlets with mass flow control 1 1 1 2 2
Power supply 230 V, 50/60 Hz 230 V, 50/60 Hz 230 V, 50/60 Hz 230 V, 50/60 Hz 230 V, 50/60 Hz
Power input (without pump)
[kVA]
0.5 1.5 1.5 2.2 2.2
Dimensions of the system
(W x D x H)
[mm]
640 x 710 x 710 720 x 820 x 820 670 x 900 x 1,850 670 x 900 x 1,850 850 x 900 x 1,850

Options

         
Additional gas inlets 2 2 3 2 2
Additional excitation frequencies
(40 kHz, 13.56 MHz)
- - yes yes Yes
Soft start/slow vent Yes Yes Yes Yes Yes
Lateral microwave feed-in Yes - Yes - Yes
Rotary table - - Yes Yes Yes
Rotary drum Yes - Yes Yes Yes
Pullout door - Yes - Yes Yes
Automatic door opening - - - Yes Yes

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