| UHV systems |
| Layer by layer - coating and analytics |
| The product-line UHV-systems mainly focuses and design an assembly of UHV-coating
and surface analysis systems. |
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UHV magnetron sputter device
for simultaneous coating of four 150 mm substrates.
UHV cluster tool coating system for producing X-ray mirrors.
UHV-coating system with load-lock for material research in laser physics.
