VADU200 Prozesskammer

Batch soldering system VADU 200XL

Vacuum supported soldering of substrates

The soldering system of type VADU200 XL is equipped with two separate process chambers and can be operated with paste as well as preforms.

This allow the precise control of all relevant process parameters e.g. the tempera­ture gradients during heating and cooling. Due to its intelligent temperature management the system provides short cycle times and an excellent temperature stability.



Type of system Batch System
Number of vacuum chambers 2 chambers
Process area (W x D) 410 x 280 mm
Clearance height max. 100 mm
Vacuum (standard) ≤ 2 mbar
Dimensions of the system (W x D x H) 1,200 x 1,890 x 1,680 mm
Dimensions of pumping unit Integrated
Weight 1,200 kg
Power supply 3 x 400 V, 50/60 Hz
Power input 10 kVA
SMEMA interface
Options:  
Alternative process areas (W x D) 420 x 320 mm (W version)
Wafer Up to 12"
Process temp. up to 500 °C
Induction heating
Handling/Transfer systems
High vacuum
MES interfaces (e.g. SECS/GEM)


System features

  • Void-free solder connections
  • Soldering with preforms or paste
  • Individual soldering profiles
  • Process temperatures
    up to 400 °C
  • Controlled temperature gradients
  • Short cycle times
  • Separate soldering and cooling chamber
  • Formic acid process
  • Flux management
  • Inert gas atmosphere
  • Residual oxygen content < 5 ppm
  • Reproducibility of the soldering results
  • Traceability
  • Permanent process control
  • Ethernet interface
  • Remote maintenance (VPN)
  • Low energy and media consumption
  • Internationally patented system