Low-pressure plasma system V6-G

Standard systems for activation, cleaning, coating, etching

Efficient tabletop unit

The standard unit V6-G is designed as a tabletop device for industrial small series production as well as for the low-pressure plasma treatment in R&D laboratories. It can be used for the surface treatment processes cleaning and activation.

The integrated professional PLC control serves as a storage for definable processes and parameters.

Type of system Tabletop unit
Dimensions of the chamber (W x D x H) 170 x 200 x 170 mm
Microwave power 50-300 W
Gas inlets with mass flow control 1
Power supply 230 V, 50/60 Hz
Power input (without pump) 0,5 kVA
Dimensions of the system (W x D x H) 640 x 710 x 710 mm
Additional gas inlets 2
Additional excitation frequencies
(40 kHz, 13.56 MHz)
Soft start / slow vent
Lateral microwave coupling
Rotary table
Rotary drum
Pullout door
Automatic door opening

System features

  • USB port
  • Ethernet interface
  • Remote maintenance (VPN)
  • Microwave source (2.45 GHz)
  • Swing door