Low-pressure plasma system V15-G

Standard systems for activation, cleaning, coating, etching

The system is integrated in a 19“ rack, which is equipped with rollers and height- adjustable feet.

A professional PLC control unit serves as a storage for definable process parameters.

Type of system 19" cabinet
Dimensions of the chamber (W x D x H) 250 x 250 x 250 mm
Microwave power 100 – 600 W
Gas inlets with mass flow control 1
Power supply 230 / 400 V, 50 / 60 Hz
Power input (without pump) 1.5 kVA
Dimensions of the system (W x D x H) 670 x 900 x 1,850 mm
Additional gas inlets 3
Additional excitation frequencies
(40 kHz, 13.56 MHz)
Soft start / slow vent
Lateral microwave coupling
Rotary table
Rotary drum
Pullout door
Automatic door opening

System features

  • USB port
  • Ethernet interface
  • Remote maintenance (VPN)
  • Microwave source (2.45 GHz)
  • Swing door